3D Auto Measurement Unit (S5 Stage)
Keyence VHX-S15H
Digital Microscope VHX-2000 series
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Specification
| Model | VHX-S15H | |
| Motor | 5-phase stepping motor | |
| Positioning accuracy | 6 µm*1 | |
| Repeatability | ±0.5 µm*1 | |
| Stage stroke distance | 15 mm | |
| Resolution | 0.05 µm/pulse | |
| Load capacity | 5 kg | |
| Rating | Power voltage | 100 to 240 VAC, 50/60 Hz |
| Power consumption | 70 VA | |
| Environmental resistance | Ambient temperature | +5 to +40 °C |
| Relative humidity | 35 to 80 % RH (No condensation) | |
| Weight | 1.3 kg | |
| *1 Positioning accuracy and repeatability specifications apply to the motorised stage |
