Shape Measurement Laser Microscope
Keyence VK-X100K
3D Laser Scanning Confocal Microscope VK-X series
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Specification
| Model | VK-X100K | |
| Type | Controller | |
| Objective lens magnification | Magnification on a 15” monitor 100x | ? |
| Magnification on a 15” monitor 200x | ||
| Magnification on a 15” monitor 400x | ||
| Magnification on a 15” monitor 1000x | ||
| Magnification on a 15” monitor 2000x | ||
| Magnification on a 15” monitor 3000x | ||
| Observation/ measuring range | Horizontal (H): ?m | Magnification on a 15” monitor 100x |
| Magnification on a 15” monitor 200x | ||
| Magnification on a 15” monitor 400x | ||
| Magnification on a 15” monitor 1000x | ||
| Magnification on a 15” monitor 2000x | ||
| Magnification on a 15” monitor 3000x | ||
| Vertical (V): ?m | Magnification on a 15” monitor 100x | |
| Magnification on a 15” monitor 200x | ||
| Magnification on a 15” monitor 400x | ||
| Magnification on a 15” monitor 1000x | ||
| Magnification on a 15” monitor 2000x | ||
| Magnification on a 15” monitor 3000x | ||
| Working distance: mm | Magnification on a 15” monitor 100x | |
| Magnification on a 15” monitor 200x | ||
| Magnification on a 15” monitor 400x | ||
| Magnification on a 15” monitor 1000x | ||
| Magnification on a 15” monitor 2000x | ||
| Magnification on a 15” monitor 3000x | ||
| Numerical Aperture (N.A.) | Magnification on a 15” monitor 100x | |
| Magnification on a 15” monitor 200x | ||
| Magnification on a 15” monitor 400x | ||
| Magnification on a 15” monitor 1000x | ||
| Magnification on a 15” monitor 2000x | ||
| Magnification on a 15” monitor 3000x | ||
| Optical zoom | 1x to 8x | |
| Total magnification | 100x to 8000x | |
| Optical system for observation/measurement | Pinhole confocal optical system | |
| Height measurement | Measuring range | 7 mm |
| Z-resolution | 0.005 µm | |
| Repeatability ? | 0.02 µm*1 | |
| Width measurement | Display resolution | 0.01 µm |
| Repeatability 3? | 0.05 µm*2 | |
| Frame memory | Pixel count | 2048 x 1536, 1024 x 768, 1024 x 64 |
| For monochrome image | 16 bit | |
| For colour image | 8-bit for RGB each | |
| For height measurement | 21-bit | |
| Frame rate | Surface scan | 4 Hz to 120 Hz |
| Line scan | 7900 Hz | |
| Auto function | AAG (Auto gain), Auto focus, Auto upper/lower limit setting, Double Scan brightness settings | |
| Measurement laser light source for measurements | Wavelength | Red semiconductor laser, 658 nm |
| Maximum output power | 0.95 mW | |
| Laser Class | Class 2 Laser Product (IEC 60825-1, FDA (CDRH) Part1040.10 *3) | |
| Laser light-receiving element | PMT (Photoelectron Multiplier Tube) | |
| Light source for optical observation | Lamp | 100 W halogen lamp |
| Colour camera for optical observation | Imaging element | 1/3" Colour CCD image sensor |
| Recording resolution | Super high resolution (3072×2304) | |
| Auto adjustment | Gain, Shutter speed | |
| Data processing unit | Dedicated PC, supplied by KEYENCE with the VK-X (OS: Windows 7 Professional Edition) *4 | |
| Rating | Power voltage | 100 to 240 VAC ±10 %, 50/60 Hz |
| Power consumption | 450 VA max. | |
| Weight | Approx. 11 kg | |
| *1 When a standard height difference of 2 µm is measured with the 50x objective lens. *2 When the KEYENCE reference chart line width of 1 µm is measured with the 50 x objective lens (optical zoom 2 x) in line peak mode (image averaging: 8 times). *3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No.50. *4 Windows 7 is a registered trademark of Microsoft, U.S.A. |
