Shape Measurement Laser Microscope
Keyence VK-X110
3D Laser Scanning Confocal Microscope VK-X series
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Specification
| Model | VK-X110 | ||
| Type | Measurement unit | ||
| Objective lens magnification | Magnification on a 15” monitor 200x | 10× | |
| Magnification on a 15” monitor 400x | 20× | ||
| Magnification on a 15” monitor 1000x | 50× | ||
| Magnification on a 15” monitor 2000x | 100× | ||
| Observation/ measuring range | Horizontal (H): ?m | Magnification on a 15” monitor 200x | 1350 |
| Magnification on a 15” monitor 400x | 675 | ||
| Magnification on a 15” monitor 1000x | 270 | ||
| Magnification on a 15” monitor 2000x | 135 | ||
| Vertical (V): ?m | Magnification on a 15” monitor 200x | 1012 | |
| Magnification on a 15” monitor 400x | 506 | ||
| Magnification on a 15” monitor 1000x | 202 | ||
| Magnification on a 15” monitor 2000x | 101 | ||
| Working distance: mm | Magnification on a 15” monitor 200x | 16.5 | |
| Magnification on a 15” monitor 400x | 3.1 | ||
| Magnification on a 15” monitor 1000x | 0.54 | ||
| Magnification on a 15” monitor 2000x | 0.3 | ||
| Numerical Aperture (N.A.) | Magnification on a 15” monitor 200x | ||
| Magnification on a 15” monitor 400x | 0.46 | ||
| Magnification on a 15” monitor 1000x | 0.8 | ||
| Magnification on a 15” monitor 2000x | 0.95 | ||
| Optical zoom | 1x to 8x | ||
| Total magnification | 200x to 16000x | ||
| Optical system for observation/measurement | Pinhole confocal optical system | ||
| Height measurement | Measuring range | 7 mm | |
| Z-resolution | 0.005 µm | ||
| Repeatability ? | 0.02 µm*1 | ||
| Width measurement | Display resolution | 0.01 µm | |
| Repeatability 3? | 0.03 µm*2 | ||
| Frame memory | Pixel count | 2048 x 1536, 1024 x 768, 1024 x 64 | |
| For monochrome image | 16 bit | ||
| For colour image | 8-bit for RGB each | ||
| For height measurement | 21-bit | ||
| Frame rate | Surface scan | 4 Hz to 120 Hz | |
| Line scan | 7900 Hz | ||
| Auto function | AAG (Auto gain), Auto focus, Auto upper/lower limit setting, Double Scan brightness settings | ||
| Measurement laser light source for measurements | Wavelength | Red semiconductor laser, 658 nm | |
| Maximum output power | 0.95 mW | ||
| Laser Class | Class 2 Laser Product (IEC 60825-1, FDA (CDRH) Part1040.10 *3) | ||
| Laser light-receiving element | PMT (Photoelectron Multiplier Tube) | ||
| Light source for optical observation | Lamp | 100 W halogen lamp | |
| Colour camera for optical observation | Imaging element | 1/3" Colour CCD image sensor | |
| Recording resolution | Super high resolution (3072×2304) | ||
| Auto adjustment | Gain, Shutter speed | ||
| Data processing unit | Dedicated PC, supplied by KEYENCE with the VK-X (OS: Windows 7 Professional Edition) *4 | ||
| Software | Auto-focus software | This is software that automatically focuses the image during observation. | |
| Pixel shift software | This is software that increases the number of pixels recorded by shifting pixels during image recording. | ||
| HDR function software | This is software that obtains 16-bit data to optimize the image appearance. | ||
| RPD function software | This is an algorithm that detects the measurement result quickly and accurately. | ||
| AAG function software | This is software that automatically adjusts the laser light-receiving sensitivity within the setting range. | ||
| Auto upper/lower limit setting software | This is software that automatically recognizes the upper and lower limits of the target and sets the measurement range. | ||
| Beginner mode function software | This is software that can be used to easily perform measurements as flow charts. | ||
| Comment function software | This is software that displays comments on the observation screen. | ||
| Measurement and scale display software | This is software that displays a scale on the dimension measurement and observation screen. | ||
| Rating | Power voltage | 100 to 240 VAC ±10 %, 50/60 Hz | |
| Power consumption | 450 VA max. | ||
| Weight | Approx. 25 kg (Measuring head detached: approx. 8.5 kg) | ||
| *1 When a standard height difference of 2 µm is measured with the 50x objective lens. *2 When the KEYENCE reference chart line width of 1 µm is measured with the 100 x objective lens in line peak mode (image averaging: 8 times). *3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No.50. *4 Windows 7 is a registered trademark of Microsoft, U.S.A. |
