Wide-Area 3D Measurement System Macroscope Head
Keyence VR-3200
Wide-Area 3D Measurement System VR series
Categories: Microscopes, Profilometer / Roughness
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Specification
Model | VR-3200 | |||
Type | Head | |||
Applicable controller | VR-3000K | |||
Field-of-view | Wide-field mode | Magnification on a 15" monitor 12x | Horizontal | 24 mm |
Vertical | 18 mm | |||
Magnification on a 15" monitor 25x | Horizontal | 12 mm | ||
Vertical | 9 mm | |||
Magnification on a 15" monitor 38x | Horizontal | 8 mm | ||
Vertical | 6 mm | |||
Magnification on a 15" monitor 50x | Horizontal | |||
Vertical | 4.5 mm | |||
High magnification mode | Magnification on a 15" monitor 40x | Horizontal | 7.6 mm | |
Vertical | 5.7 mm | |||
Magnification on a 15" monitor 80x | Horizontal | 3.8 mm | ||
Vertical | 2.9 mm | |||
Magnification on a 15" monitor 120x | Horizontal | 2.5 mm | ||
Vertical | 1.9 mm | |||
Magnification on a 15" monitor 160x | Horizontal | |||
Vertical | 1.4 mm | |||
Zoom | 1x to 4x | |||
Measurement accuracy | Height measurement | ±3 µm*1 | ||
Width measurement | Wide-field mode: ±5 µm, High magnification mode: ±2 µm*1 | |||
Stitching function | Full automatic (XY stage automatic control + auto focus) measurement*2 Auto adjustment, Auto template analysis*2 | |||
Stage | Z stroke | 90 mm (electric) | ||
Rotation | ±180°(sample rotating stage) | |||
Tilt | ±30° or more | |||
Working distance | 75 mm | |||
Image receiving element | 4 megapixel monochrome CMOS | |||
Transmitter lens | Double telecentric lens x2 | |||
Receiver lens | Double telecentric lens | |||
Light sources | Observation light source | LED ring light (red, green, blue) | ||
Measurement light source | White LED | |||
Image size | 1024 x 768 pixels, 2048 x 1536 pixels | |||
Rating | Power voltage | 100 to 240 VAC ±10 %, 50/60 Hz | ||
Power consumption | 150 VA | |||
Environmental resistance | Ambient temperature | +15 to +30 °C | ||
Relative humidity | 35 to 80 % RH (No condensation) | |||
Weight | 28.0 kg | |||
*1 Value obtained using KEYENCE's specified standard gauge with measurement in KEYENCE's specified measurement mode (ambient temperature: 23±1°C). *2 The stitching module (VR-H2J) is required. |