Wide-Area 3D Measurement System Controller
Keyence VR-5000
Wide-Area 3D Measurement System VR series
Categories: Microscopes, Profilometer / Roughness
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Specification
Model | VR-5000 | |||
Type | Controller | |||
Light sources | Observation light source | LED ring light (red, blue, green) | ||
Measurement light source | White LED | |||
Head | VR-5200, VR-5100 | |||
Field-of-view | Low magnification (wide field of view) | Magnification on a 15" monitor 12× | Horizontal | 24.0 mm |
Vertical | 18.0 mm | |||
Magnification on a 15" monitor 25× | Horizontal | 12.0 mm | ||
Vertical | 9.0 mm | |||
Magnification on a 15" monitor 38× | Horizontal | 8.0 mm | ||
Vertical | 6.0 mm | |||
Magnification on a 15" monitor 50× | Horizontal | |||
Vertical | 4.5 mm | |||
High magnification (high resolution) | Magnification on a 15" monitor 40× | Horizontal | 7.6 mm | |
Vertical | 5.7 mm | |||
Magnification on a 15" monitor 80× | Horizontal | 3.8 mm | ||
Vertical | 2.9 mm | |||
Magnification on a 15" monitor 120× | Horizontal | 2.5 mm | ||
Vertical | 1.9 mm | |||
Magnification on a 15" monitor 160× | Horizontal | |||
Vertical | 1.4 mm | |||
Zoom | 1× to 4× | |||
Height measurement | Display resolution | 0.1 µm | ||
Height measurement range | Without Z stitching | Low magnification (wide field of view) : 10 mm High magnification (high resolution) : 1 mm | ||
With Z stitching | Low magnification (wide field of view) : 50 mm High magnification (high resolution) : 30 mm | |||
Repeatability (?) | Without Z stitching | 0.4 µm*1 | ||
With Z stitching | 1.0 µm*1 | |||
Measurement accuracy | Without Z stitching | ±2.5 µm*1 | ||
With Z stitching | ±4.0 µm*1 | |||
Width measurement | Repeatability (?) | Low magnification (wide field of view) : 1 µm High magnification (high resolution) : 0.5 µm *1 | ||
Measurement accuracy | Low magnification (wide field of view) : ±5 µm High magnification (high resolution) : ±2 µm *1 | |||
Stitching function | VR-5200: Fully-automated measurement (XY automatic control + Z automatic control) , Automatic mapping creation, Automatic area setting VR-5100: Manual measurement (XY manual operation + Z automatic control) *2 | |||
XY measurable range | VR-5200: 206 x 104 mm VR-5100: 92 x 86 mm *2 | |||
Stage | XY stroke | VR-5200: 184 x 88 mm (motorised) VR-5100: 70 x 70 mm (manual) | ||
Z stroke | 73 mm (motorised) | |||
Load capacity | 4.5 kg | |||
Working distance | 75 mm | |||
Image receiving element | 4 megapixel monochrome CMOS | |||
Transmitter lens | Double-telecentric lens x 2 | |||
Receiver lens | Double-telecentric lens | |||
Data processing | Dedicated PC specified by KEYENCE (OS: Windows 10 Pro) | |||
Power supply | Power voltage | 100 to 240 VAC, 50/60 Hz | ||
Power consumption | 200 VA max. | |||
Environmental resistance | Operating ambient temperature | +15 to 30 °C | ||
Operating ambient humidity | 20 to 80 % RH (no condensation) | |||
Weight | Approx. 4 kg | |||
*1 Value obtained using KEYENCE’s specified standard gauge with measurement in KEYENCE’s specified measurement mode (ambient temperature: 23 ±1 °C ) *2 Measurement expansion module (VR-H3J) required |