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HomeMicroscopesProfilometer / Roughness Keyence VR-5100
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Wide-Area 3D Measurement System Keyence VR-3100
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Wide-Area 3D Measurement System Keyence VR-5100

Keyence VR-5100

Wide-Area 3D Measurement System VR series

Categories: Microscopes, Profilometer / Roughness
  • Description
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  • Specification
Description

Wide-Area 3D Measurement System Head

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Specification
Model VR-5100
Type Head
Light sources Observation light source LED ring light (red, blue, green)
Measurement light source White LED
Controller VR-5000
Field-of-view Low magnification (wide field of view) Magnification on a 15" monitor 12× Horizontal 24.0 mm
Vertical 18.0 mm
Magnification on a 15" monitor 25× Horizontal 12.0 mm
Vertical 9.0 mm
Magnification on a 15" monitor 38× Horizontal 8.0 mm
Vertical 6.0 mm
Magnification on a 15" monitor 50× Horizontal
Vertical 4.5 mm
High magnification (high resolution) Magnification on a 15" monitor 40× Horizontal 7.6 mm
Vertical 5.7 mm
Magnification on a 15" monitor 80× Horizontal 3.8 mm
Vertical 2.9 mm
Magnification on a 15" monitor 120× Horizontal 2.5 mm
Vertical 1.9 mm
Magnification on a 15" monitor 160× Horizontal
Vertical 1.4 mm
Zoom 1× to 4×
Height measurement Display resolution 0.1 µm
Height measurement range Without Z stitching Low magnification (wide field of view) : 10 mm High magnification (high resolution) : 1 mm
With Z stitching Low magnification (wide field of view) : 50 mm High magnification (high resolution) : 30 mm
Repeatability (?) Without Z stitching 0.4 µm*1
With Z stitching 1.0 µm*1
Measurement accuracy Without Z stitching ±2.5 µm*1
With Z stitching ±4.0 µm*1
Width measurement Repeatability (?) Low magnification (wide field of view) : 1 µm High magnification (high resolution) : 0.5 µm *1
Measurement accuracy Low magnification (wide field of view) : ±5 µm High magnification (high resolution) : ±2 µm *1
Stitching function Manual measurement (XY manual operation + Z automatic control)*2
XY measurable range 92 x 86 mm*2
Stage XY stroke 70 x 70 mm (manual)
Z stroke 73 mm (motorised)
Load capacity 4.5 kg
Working distance 75 mm
Image receiving element 4 megapixel monochrome CMOS
Transmitter lens Double-telecentric lens x 2
Receiver lens Double-telecentric lens
Data processing Dedicated PC specified by KEYENCE (OS: Windows 10 Pro)
Power supply Power voltage 100 to 240 VAC, 50/60 Hz
Power consumption 200 VA max.
Environmental resistance Operating ambient temperature +15 to 30 °C
Operating ambient humidity 20 to 80 % RH (no condensation)
Weight Approx. 25 kg*3
*1 Value obtained using KEYENCE’s specified standard gauge with measurement in KEYENCE’s specified measurement mode (ambient temperature: 23 ±1 °C ) *2 Measurement expansion module (VR-H3J) required *3 Weight of only measurement unit: Approx. 11 kg

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Keyence is a leading supplier of sensors and instrumentation for a variety of industries. The company offers sensors, measuring systems, vision systems, laser markers, digital microscopes and other products.

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Phone: +49 (451) 703 64 999
Email: info@sensors-trade.com
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